Preface / Frequently Used Symbols / Explanation of Frequently Used Abbreviations Fundamental Concepts Silicon and Its Imperfections; The Electron System; Phenomenological and Atomistic Approaches to Diffusion; Thermodynamics; Reaction Kinetics; Exchange of Matter Between Phases; Bibliography Intrinsic Point Defects Concentration in Thermal Equilibrium; Diffusion of Intrinsic Point Defects; Self-Diffusion and Tracer Diffusion; Vacancies; Self-Interstitials; Frenkel Pairs; Bulk Recombination and Bulk Processes; Surface Recombination and Surface Processes; Initial Conditions; Bibliography Impurity Diffusion in Silicon Basic Mechanisms; Impurity-Point-Defect Pairs; Diffusion of Substitutional Impurities via Mobile Complexes with Intrinsic Point Defects; Pair-Diffusion Models; Frank-Turnbull Mechanism; Kick-Out Mechanism; Bibliography Isovalent Impurities Carbon; Germanium; Tin; Bibliography Dopants Dopant Clusters; Ion Pairing; Boron; Aluminum; Gallium; Indium; Nitrogen; Phosphorus; Arsenic; Antimony; Bibliography Chalcogens Oxygen; Sulfur; Selenium; Tellurium; Bibliography Halogens Fluorine; Chlorine; Bromine; Bibliography List of Tables / List of Figures / Index